Used TEL / TOKYO ELECTRON Alpha 303i-K #9381809 for sale
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ID: 9381809
Wafer Size: 12"
Vintage: 2004
Furnace, 12"
MTO
Heater type: VMM-56-002
Gas: Pure N2, SiH4, N2O
2004 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a state-of-the-art diffusion furnace that is an ideal tool for those performing semiconductor research and development. The device features a graphite susceptor that is surrounded by a quartz chamber with a unique gas distribution system. This chamber is held in place within the aluminum housing on an intense PID (programmable interface device) controlled stage, which allows for precise temperature control. This allows the user to accurately and repeatedly conduct processes such as oxidation and diffusion of materials. TEL ALPHA 303IK features three sealed heating elements that utilize the double-walled quartz tube along with a powerful eddy current generator and cool-down system. This enables tight temperature control up to 1,500°C and uniform gas coverage, resulting in more consistent and reliable results. In addition, the susceptor can be replaced with susceptors made from different materials to expand the variety of available processes, such as anodization, eutectic technique, SiC vapor deposition, and other semiconductor processes. TOKYO ELECTRON ALPHA 303 I K includes other components such as a plasma control unit, gas flow controllers, sensor unit, sample heat/cool controllers, and emergency shutoff systems. This ensures safety and prevents damage to the device or sample. Further, the furnace's built-in PC can be used to save up to 128 programs once created, allowing the user to access their tested parameters with ease and efficiency. ALPHA 303 I K is ideal for a wide range of applications in the semiconductor industry. Its features make it a powerful tool for achieving high yields of complex, high-performance devices such as high-density transistors, memory chips, and processors that require extreme precision. This results in greater device performance, and reinforces TEL ALPHA 303 I K's reputation as one of the most reliable and accurate diffusion furnaces currently on the market.
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