Used TEL / TOKYO ELECTRON Alpha 303i-K #9381821 for sale
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ID: 9381821
Wafer Size: 12"
Vintage: 2004
Furnace, 12"
MTO
Heater type: VMM-56-002
Gas: Pure N2, SiH4, N2O
2004 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a high-precision diffusion furnace and associated accessories designed for reliable and accurate production. The 303i-K employs an advanced 3-zone tubular furnace design and custom-made integrated bellows to create a uniform temperature profile for optimal process control. This combination of superior engineering and modern features makes the 303i-K ideal for a wide range of application requirements. The advanced engineering of TEL ALPHA 303IK offers a variety of impressive features that optimize process control and thermal performance. It features an efficient ceramic heating element structure that provides excellent thermal insulation. This design reduces heat loss and allows for effective thermal control. Furthermore, an integrated, stainless-steel bellows ensures uniform temperature distribution across the furnace chamber. The advanced design of TOKYO ELECTRON ALPHA 303 I K offers superior process stability and consistency. The integrated microprocessor-based control equipment ensures precise temperatures at all points during the diffusion process. Its integrated air cooling system enables fast recovery from thermal shock, which helps minimize process down time. The control unit also provides significant process automation and data storage capability. TOKYO ELECTRON ALPHA 303IK includes a range of precision accessories to ensure maximum efficiency and precision. Custom-made load locks, process chambers, and process support systems are available to meet specific application requirements. Standard accessories include thermal controllers, mass flow controllers, samplers, helium leak detectors, and safety systems. For maintenance and repair, TEL / TOKYO ELECTRON ALPHA 303 I K is designed with ease-of-access in mind. The furnace chamber is easily accessible for inspection and the modular process chambers enable fast and simple repairs. The intelligent control machine provides detailed diagnostics and assists troubleshooting and maintenance procedures. Overall, Alpha 303i-K is a state-of-the-art diffusion furnace and accessory package designed for accurate and reliable manufacturing operations. With its advanced design, integrated controls, and precision accessories, ALPHA 303 I K is the perfect solution for a variety of process applications.
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