Used TEL / TOKYO ELECTRON Alpha 303i-K #9381855 for sale
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ID: 9381855
Wafer Size: 12"
Vintage: 2005
Furnace, 12"
Process: D-Poly
Heater type: VMM-56-002
Gas: SiH4, 0.1%PH3/N2, ClF3
FUJIKIN Air valve
STEC: MFC, MFM
Load lock
Missing parts:
(2) Hard Disk Drives (HDD)
Quartz wares
2005 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a state-of-the-art diffusion furnace with accessories designed to provide reliable and accurate process control and flexible usage in both development and production environments. TEL ALPHA 303IK is well suited for applications in the semiconductor industry such as deposition of thin films, annealing and diffusion. TOKYO ELECTRON ALPHA 303 I K is equipped with precise and accurate process controllers, allowing for greater control and consistency throughout the process. The furnace maintains uniform temperature conditions, even during rapid process changes, by using the internal feedback system and advanced control technology that maintains the heat requirements. This ensures high quality outputs with each process. Alpha 303i-K is designed for both laboratory and industrial applications. It is a user-friendly diffusion furnace, featuring a computer-controlled power-adjustable heating system for accurate and dependable processing. This allows for the configuration of uniform heating for the entire processing area, even with large sample sizes. TOKYO ELECTRON Alpha 303i-K is equipped with accessories including a Nitrogen purge unit, sample racks, a high-capacity quartz boat and a ceramic nozzle for precise and repeatable shot delivery. The nitrogen purge unit helps to reduce oxygen levels necessary for demanding processes and the ceramic nozzle and quartz boat combine to ensure a uniform process atmosphere. TEL ALPHA 303 I K is also compatible with SEMI Standard wafers up to 200mm in diameter and other sample sizes, allowing for maximum flexibility in usage. It also provides a convenient loading and unloading area to reduce labor during setup and operation of the system. In conclusion, TEL / TOKYO ELECTRON ALPHA 303IK is a high-performance diffusion furnace with accessories that provide precision and accuracy in both development and industrial applications. It offers excellent control and user-friendly operation, as well as an impressive array of accessories and settings to ensure process uniformity and dependable outputs.
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