Used TEL / TOKYO ELECTRON Alpha 303i-K #9381862 for sale
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ID: 9381862
Wafer Size: 12"
Vintage: 2005
Furnace, 12"
Process: DCS-HTO
Heater type: VOS-56-003
Gas: NH3 / SiH2Cl2 / N2O / SiH4
2005 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace and accessory that is used for the production of polysilicon wafers in the microelectronics industry. The design of the unit allows for rapid thermal processing and rapid cooling, which makes it suitable for use in a wide variety of applications. It features a large chamber which is housed in a durable steel casing and a highly efficient air baffle equipment that helps to reduce thermal losses. The large chamber is capable of accommodating up to 1000 wafers. TEL ALPHA 303IK has several different zones and electrodes, each of which is designed to perform a specific role in the heating and cooling process. This includes a heating zone in which the temperature can be adjusted in a range of 250-1600 degrees Celsius. A cooling zone, adjustable from 0-125 degrees Celsius, is also included, enabling rapid cooling of already heated wafers. The hot zone features an ion beam gun, which is capable of precisely controlling the temperature and ions, resulting in a uniform distribution of ions on the wafers. TOKYO ELECTRON ALPHA 303 I K has a durable stainless steel exterior and a vacuum tight unit, making it suitable for use in cleanroom environments. It also features an advanced safety system that monitors and adjusts the temperature and pressure of the furnace to prevent over-heating, which helps to extend the life of the unit and increase product quality. The control unit also includes an LCD monitor, allowing users to monitor the temperature and pressure in the machine. In addition to the thermal processing capabilities, TEL / TOKYO ELECTRON ALPHA 303 I K also comes with several accessories that can help optimize the process. These include an ion source, an isolator shield and a remote control, all of which help to improve the accuracy of the process and reduce contamination in the tool. Overall, Alpha 303i-K diffusion furnace and accessory is an advanced piece of thermal processing equipment that is suitable for a range of applications. Its features and accessories make it a reliable tool for producing quality polysilicon wafers, reducing contamination and maximizing efficiency.
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