Used TEL / TOKYO ELECTRON Alpha 303i-K #9381863 for sale
URL successfully copied!
ID: 9381863
Wafer Size: 12"
Vintage: 2009
Furnace, 12"
Process: DCS-HTO
Heater type: VOS-56-003
Gas: NH3 / SiH2Cl2 / N2O / SiH4
2009 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace and accessory designed to provide maximum performance for both temperature accuracy and uniformity. This unique equipment is an industry leading diffusion furnace solution with advanced embedded control technology (AEC) for controlling heat flux, convection, temperature profile, and more. TEL ALPHA 303IK is equipped with three-zone dual-high-pressure forced convection hot plate design offering excellent temperature uniformity and highly accurate temperature control for production and research applications. The forced convection configuration ensures controlled, uniform thermal processing over an extensive temperature range, from room temperature up to 1050°C. The furnace is equipped with a wide variety of features such as power interruption protection, high accuracy of temperature adjustment with a step range of ±1°C, a built-in pyrometer with an adjustable temperature range of up to 1400°C, and an advanced AEC system to provide superior process stability and product homogeneity. The AEC unit allows for precise temperature control at set point temperatures, with excellent temperature uniformity and heat flux in a single zone environment. The machine is perfected with an intuitive control panel allowing you to quickly adjust process parameters for multiple user applications. TOKYO ELECTRON ALPHA 303 I K also supplies a highly accurate gas delivery tool to ensure close tolerances for both nitrogen and mixed gas processes. This coupled with robust safety and alarm features provide a high level of process control and operator safety with a wide range of diffusion processes. The unit is available as an individual purchase or as an integrated diffusion asset. The integrated package includes TOKYO ELECTRON Alpha 303i-K, single or multi-zone controllers, thermally insulated chamber, and supply lines for inert gas, reactants, and protective gasses, and quartz components for efficient thermal processing, as well as monitoring and analysis for real-time operator oversight. In conclusion, Alpha 303i-K is an advanced diffusion furnace and accessory with a wide range of features to meet the needs of various temperature-sensitive applications. Its advanced AEC model, temperature uniformity, and precise process control make it an ideal choice for any lab requiring reliable and efficient temperature processing.
There are no reviews yet