Used TEL / TOKYO ELECTRON Alpha 303i-K #9390670 for sale

TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace and associated accessories that can provide temperature uniformity, repeatability and stability of up to ± 3°C, while allowing the user to maintain a maximum furnace temperature of up to 1,000°C. This equipment provides high-temperature diffusion deposition and processing of numerous materials, such as polysilicon, tungsten, silicides, and deposited high temperature dielectric (HTD) films. The unit is designed with an anti-contamination air management equipment that reduces pollution caused from chemical species. TEL ALPHA 303IK offers a wide range of features and functions including a wafer-level thermal uniformity feedback that is capable of automatically controlling the temperature within ± 3°C. As well as, an enamel cabable of up to 10% heat transfer efficiency,an advanced electrical control system, and wide range of protective interlocks to ensure safe and reliable operation. The diffusion furnace also offers high temperature quartz boats to accommodate up to five 6" wafers and optimized unit control effectiveness. The unit also includes a unique nozzle design with specifications and features that are optimized for higher thermal mass extraction, as well as improved uniformity, repeatability and stability. The diffusion chamber is enclosed in a DLC coating that provides a protective chemical resistance and increased thermal insulation to ensure consistent wafer-to-wafer uniformity. To further ensure the sturdiness and durability of the unit, the furnace body is designed with a dual wall insulation machine. The unit also offers an easy-to-use, interactive graphical user interface (GUI) that allows users to access, monitor or control the tool from a remote PC or handheld device. Through a sensing lid, the unit also provides real-time furnace atmosphere control, monitoring and reporting. Additionally, the asset is able to provide temperature logging and temperature control in a single package and all model parameters can be stored in internal memory for recall, reference and comparison purposes. TOKYO ELECTRON ALPHA 303 I K is a highly advanced, high-temperature diffusion furnace that allows users to conveniently and accurately process materials quickly, with minimal risk of contamination. Additionally, the equipment is equipped with features that facilitate automated control and provides users with a wide range of functions and features. As a result, the unit is suitable for processing a wide range of materials in a wide range of industries, such as semiconductors, solar cells, flat panel displays, LEDs, and other optoelectronic components.