Used TEL / TOKYO ELECTRON Alpha 303i-K #9394982 for sale

TEL / TOKYO ELECTRON Alpha 303i-K
ID: 9394982
Wafer Size: 12"
Furnace, 12" MTO.
TEL / TOKYO ELECTRON Alpha 303i-K is a high performance diffusion furnace and accompanying accessories. It is designed for use in industrial applications, such as metal hardening, semiconductor fabrication, and solar cell production. Its structure consists of an isolated chamber for heating vacuum and a framework for accommodating the diffusion furnace and accessories. The chamber is made from stainless steel to provide high thermal stability. Its internal volume is capable of accommodating up to eight wafers. TEL ALPHA 303IK is equipped with a SmartAligner 2.0 system that uses a dielectric filter to easily align the immersion lens to the wafer. It also features advanced optical elements for improved image quality. The diffusion furnace of TOKYO ELECTRON ALPHA 303 I K has a dual-source sublimation heater that enables a range of temperature control, from room temperature up to 600°C. A secondary heating element provides additional flexibility when operating at a low temperature. TOKYO ELECTRON Alpha 303i-K is equipped with a variety of accessories, including a vacuum pump and a thermal insulation unit to provide improved uniformity of the substrate. It also features a turbo pump to rapidly evacuate the chamber and a thermocouple for measuring the temperature within the chamber. In addition, ALPHA 303 I K includes integrated software for managing process parameters, such as temperature and air flow, and for controlling the wafer load. The software is recommended for analyzing the process results and optimizing the operation of the equipment. Alpha 303i-K is a reliable and efficient diffusion furnace and accessories that is suitable for a range of industrial applications. It features an isolated chamber and advanced optical components to provide accurate temperature control, while its integrated software provides greater control and process optimization.
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