Used TEL / TOKYO ELECTRON Alpha 303i-K #9394987 for sale
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TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace and its accessories used in the semiconductor manufacturing industry. TEL ALPHA 303IK functions as an efficient, low maintenance, and high-performance solution for diffusion processes. TOKYO ELECTRON ALPHA 303 I K utilizes a linear nozzle heating equipment, which ensures an even temperature distribution across the wafer. It also offers excellent wafer uniformity due to its precise temperature control. The system is equipped with a high-temperature quartz heater to guarantee consistently optimal thermal conditions. TEL / TOKYO ELECTRON ALPHA 303IK utilizes a proprietary digital heating unit, which combines innovative features to achieve uniform heat delivery, improved process control, and the highest degree of reliability. This machine features independent temperature hierarchy control, pulse heating control, and localized thermal cycle compensation for optimal temperature capability. TOKYO ELECTRON Alpha 303i-K offers many additional advantages such as gas distribution plates for precise and constant gas flow, adjustable gas flow plates for setting appropriate gas line pressure, reduced periods of non-critical heat, and sophisticated measurement functions. In addition, the tool has a maximum of 15 heating stages, which can be assigned to different temperature ranges. TOKYO ELECTRON ALPHA 303IK is designed to provide highly accurate process results and ensure repeatable process control. It has a wide temperature range from 200-1100 degrees Celsius, with exceptional temperature uniformity. Also, its advanced controller features a concise and intuitive user interface. TEL / TOKYO ELECTRON ALPHA 303 I K's diffusion accessories also provide the best conditions for optimal process quality. These accessories feature an active exhaust assembly that uses thermocouples to control exhaust line temperatures, an air gap Exhaust Damper, and Exhaust Supply Control to ensure proper exhaust air flow. It also offers automated cleaning and furnace maintenance functions, as well as embedded logging and reporting capabilities. In summary, ALPHA 303IK is a superior diffusion furnace and its accessories. Its features provide superior temperature control, high uniformity, excellent process stability, and efficient exhaust and maintenance capabilities. All these features guarantee the highest levels of process quality and productivity.
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