Used TEL / TOKYO ELECTRON Alpha 303i-K #9402693 for sale
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ID: 9402693
Wafer Size: 12"
Vintage: 2002
Furnace, 12"
Process: Metal Thermal Oxidation (MTO)
2002 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace specifically designed for tungsten and sputtering oxide film growth applications. It features a number of advanced features that are ideal for thin film growth and deposition processes. This diffusion furnace is equipped with a polarity reversing "T" electrode that allows for precise adjustment of the connection point between the furnace and the neighboring electrode. This eliminates potential problems due to the misalignment of electrodes and their respective power supplies. TEL ALPHA 303IK diffusion furnace has a three-zone, automated heat control equipment that ensures accurate temperature management throughout the entire chamber. The system is able to maintain precise control of the temperature from the 3 points of the chamber and is able to monitor the temperature at up to 20 points inside. This ensures precise temperature management which is absolutely essential for accurate thin film growth and deposition processes. TOKYO ELECTRON ALPHA 303 I K utilizes a digital PID control technology for its precise temperature control, which further ensures accuracy and consistency. The furnace is also equipped with an uninterrupted power source (UPS), making it possible to continue the deposition process even after a power failure. TEL / TOKYO ELECTRON ALPHA 303IK also features an audible alarm unit which alerts the user in case of a temperature malfunction or machine failure. Additionally, the furnace has a data logging tool which records temperatures, pressure, and RF power usage, allowing users to easily analyze and record data for further research. ALPHA 303IK is also equipped with a number of useful accessories and features which enable users to maximize its performance. These include a molybdenum boat and powered lifting device, a quartz ammeter gauge, pneumatic valves, and manual and electric shutters. All of these helpful accessories make TOKYO ELECTRON Alpha 303i-K a great choice for research or industrial applications. TEL / TOKYO ELECTRON ALPHA 303 I K is a reliable and efficient diffusion furnace that is perfect for thin film deposition and other processes requiring precise temperature management. Its cutting-edge technology and advanced features ensure high accuracy and consistency, as well as a safe and secure operation. This makes TOKYO ELECTRON ALPHA 303IK the ideal choice for thin film growth and deposition.
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