Used TEL / TOKYO ELECTRON Alpha 303i-K #9411634 for sale
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ID: 9411634
Wafer Size: 12"
Vintage: 2004
Furnace, 12"
Gases: SiH4, Si2H6, H2, ClF3, LTO520 (Liquid)
2004 vintage.
TEL / TOKYO ELECTRON Alpha 303i-K is a diffusion furnace designed for a variety of industrial applications, including semiconductor device processing and industrial heating, as well as for research and development. TEL ALPHA 303IK is a robust, durable, and reliable diffusion furnace equipped with high-performance heating and cooling systems. It includes an innovative bell-type outer structure for a uniform thermal profile and uniform dwell time, and an optional programmable automatic lift mechanism for precise temperature control. TOKYO ELECTRON ALPHA 303 I K features precise temperature control, up to 1100°C, in all size wafers, with extremely precise temperature uniformity. It also offers rapid cooling, automatic lid-position memory, and advanced safety features to prevent unintended prolonged operations at elevated temperatures. An optional "stacked-wafer kit" is available to enable uniform thermal processing of multiple wafers in one or two layers in one single furnace cycle. The advanced heating and cooling systems of TEL / TOKYO ELECTRON ALPHA 303IK allows for precise, repeatable temperature profiles for a range of industrial needs. Power input is adjustable up to 10 kW, and power output to wafer can be adjusted up to 2 kW. ALPHA 303 I K also has a built-in gas diffusion system for highly precise dry etching and/or ion implantation processes. TEL / TOKYO ELECTRON ALPHA 303 I K's user-friendly interface and powerful data analysis software helps simplify setup and operation while providing powerful functionality. The software allows users to set up operations quickly, save frequently-used setting combinations and operate using standard recipes, as well as operate multiple furnaces simultaneously. TEL Alpha 303i-K's robust construction enables it to perform reliably in industrial settings, while its extensive safety features, such as a hysteresis-actuated gas shut-off, an adjustable high temperature protector, and an emergency stop button, provide reliable protection against uncontrolled overheating or over-pressure events. Overall, ALPHA 303IK diffusion furnace offers reliable, precise thermal processing for a range of industrial applications. Its innovation bell-type outer structure, superior temperature control, rapid cooling, wide range of safety features, advanced gas diffusion systems, integrated user-friendly interface, and powerful data analysis software make it an ideal choice for temperature-critical processes.
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