Used TEL / TOKYO ELECTRON Alpha 303i Nitride #293596435 for sale

TEL / TOKYO ELECTRON Alpha 303i Nitride is a high-end diffusion furnace and related accessories. It is a multi-zone, single-wafer thermal processing equipment that is capable of three-dimensional chemical vapor deposition (CVD) and diffusion of a wide variety of materials. TEL Alpha 303i Nitride lineup includes a high-powered nitrogen crystal growth module, as well as nitride, refractory metal and transition metal CVD modules. TEL proprietary IFEC (Integrated Furnace Electronic Controller) provides a comprehensive suite of options for controlling and managing the thermal processes. TOKYO ELECTRON Alpha 303i Nitride is designed to handle larger wafers with a maximum wafer size of 300 mm. It can accommodate up to 16 wafers per process, and its high throughput makes it suitable for large-scale production. The machine also offers a wide range of high-temperature capabilities, from room temperature to up to 1100°C. Alpha 303i Nitride's "cooling roll" enables rapid cooling and helps protect the wafers during the thermal process. TEL / TOKYO ELECTRON Alpha 303i Nitride benefits from the highest purity nitrogen, argon, and other gases to achieve superior quality thermal processing. Its on-board automation software makes it easy to operate and helps maintain production yield with high precision. The optional Digital Image-Processing System (DIPS) adaptively controls the thickness distribution of nitrides and refractory materials. TEL Alpha 303i Nitride integrates advanced safety features, including an infrared safety window to prevent personnel injury, as well as a wall-mounted safety unit to detect and prevent gas leaks. The furnace is equipped with a real-time monitoring machine to monitor the status of its firing temperature, pressure, and gas flow. Additionally, a special tool for tracking wafers and quartz tubes within the tool is available. Overall, TOKYO ELECTRON Alpha 303i Nitride is an efficient and reliable diffusion furnace and CVD asset that is well-suited for large-scale production. Its powerful nitrogen crystal growth module, wide temperature range, and automated systems ensure precise control of the thermal process and help maximize production yields. The machine includes a host of safety features to protect personnel and equipment, making it an ideal choice for Nitride and refractory metal thermal processing.