Used TEL / TOKYO ELECTRON Alpha 303i Nitride #9282706 for sale

TEL / TOKYO ELECTRON Alpha 303i Nitride is an industrial-grade diffusion furnace and accessory that is designed to enable precise and accurate thermal processing with excellent uniformity. The device features a 3" capacity maximum process area that can accommodate a wide variety of substrates with precise thermal response to ensure stable and consistent results. It is capable of nitrogen gas etching, multi-zone heating4, and secondary gas inputs, allowing for improved production efficiency and repeatability. TEL Alpha 303i Nitride features TEL direct lift resistance heating and high temperature capabilities, with a temperature range of 00°C to 1400°C and a temperature uniformity of ± 1°C. The device is equipped with advanced controllers allowing for a precise and monitored nitride process. The integrated in-situ monitoring of source, target, and coolant output allows for secure and accurate processing. TOKYO ELECTRON Alpha 303i Nitride can also provide nitrogen oxide gas etching, cold wall, and multi-zone heating to enhance etching rates and uniformity of processing. In addition, Alpha 303i Nitride can be used with additional accessories to further extend its application capabilities. A retractable edge ring is available to aid in loading and unloading substrates, as well as to deliver various gas sources precisely to the target substrates. Furthermore, coupler accessories are available to provide a range of material configurations, such as waveguide and parallel plate interfaces. TEL / TOKYO ELECTRON Alpha 303i Nitride is an ideal tool for those looking to speed up nitride processing, while still maintaining a high degree of precision and repeatability. With a combination of advanced controllers, highly uniform temperatures, and a host of accessory capabilities, TEL Alpha 303i Nitride is a versatile and reliable industrial-grade diffusion furnace and accessory.