Used TEL / TOKYO ELECTRON Alpha 303i Nitride #9282707 for sale

TEL / TOKYO ELECTRON Alpha 303i Nitride is a diffusion furnace and accessory used in semiconductor and thin film production. It is ideal for a wide range of processing steps such as thermal nitride, LPCVD, multi-epitaxy and etch processes, with each step having excellent temperature uniformity and repeatability to ensure a consistent, high-quality product. TEL Alpha 303i Nitride is made up of two distinct components, the heated zone and the shower plate, and is powered by a programmable power supply, allowing for accurate and consistent heatingpower. The heated zone is an engineered quartz thermal viewing window that is located at the top of the system and operates at temperatures between 350 and 1200°C. The shower plate produces a homogeneous temperature that is evenly distributed in the process chamber, which is defined by anode and ground planes and supply frequency of 400 to 2000Hz. The system features a chamber volume of 12 liters with an access port that allows for fast material exchange between the interior and the exterior of the chamber. Its advanced temperature stability, uniformity and repeatability guarantee precise and consistent thickness in both films created and substrates that are processed. A numerical control (NC) device with a touchscreen interface allows for adjustable and safe operation of the furnace, with the user able to set up predetermined processing parameters before automatically initiating each cycle. TOKYO ELECTRON Alpha 303i Nitride also includes additional features designed to improve production turnaround time such as the auto-start feature which ensures all cycling parameters are maintained across multiple runs. Alpha 303i Nitride is designed for optimal safety of both personnel and materials, with the chamber equipped with temperature and pressure alarms and shut down functions, as well as water-cooled exterior panels that provide additional protection from heat. The system's high performance coupled with its user-friendly design and superior safety standards makes TEL / TOKYO ELECTRON Alpha 303i Nitride a great option for diffusion furnace needs.