Used TEL / TOKYO ELECTRON Alpha 303i Oxide #293597095 for sale

TEL / TOKYO ELECTRON Alpha 303i Oxide is a diffusion furnace and its associated accessories for the purpose of thermal oxidation of silicon wafers. The furnace is engineered to provide uniform thermal oxidation in both small lab-scale and production-scale operations. It is able to generate high-purity oxides, ranging from a single set temperature to a carefully tuned profile of steady-state oxidation. It utilizes a vertical-walled furnace structure to control the oxidation temperature and a mass flow controller located near the wafer load to provide high-efficiency thermal processing of the wafer. The equipment is designed for perfect thermal conditioning, delivering steady-state temperature with very low thermal gradient across the substrate surface area. The furnace is thermo-mechanically stable, rugged, and durable with low fabrication cost and maintenance. The diffusion furnace includes several features, such as a unique dual-shaft drive system, adjustable zone-by-zone temperature, pressure controllers, and digital temperature/pressure presets. The dual-shaft drive utilizes a mechanical drive to provide stable temperature control without temperature overshoot or instabilities, while the adjustable zone-by-zone temperature allows users to process different areas of the silicon wafer at different temperatures simultaneously. Additionally, the pressure controllers and digital temperature/pressure preset feature allow for precise control over the pressure and temperature during the oxide deposition process. One of the main advantages of TEL ALPHA-303I OXIDE is its streamlined automation. The automatic operation mode and on-board, computer-based utilities provide easy and efficient operation and set up of thermal oxidation recipes. The unit also provides for traceability of process and device parameters as each recipe is exhaustively analyzed after the diffusion has taken place. This ensures that all process parameters are precisely controlled and recorded, ensuring optimal yield and optimal quality. TOKYO ELECTRON ALPHA-303 I OXIDE also includes several safety features such as auto-shutoff in case of abnormal temperature increase and exhaust port alarm to indicate oxidation furnace abnormality. Additionally, the machine can be operated in either manual or auto mode, allowing user flexibility and safety. TOKYO ELECTRON ALPHA-303I OXIDE is an efficient and reliable diffusion furnace, ideal for both small and large scale thermal oxidation processes and for the production of a high-quality, uniform and thin oxide layer. It provides an outstanding thermal performance, allowing for steady-state temperatures with low thermal gradients, improving resulting quality and process yields. Additionally, its streamlined automation and safety features ensure ease-of-use and operations while providing optimal productivity and precision.