Used TEL / TOKYO ELECTRON Alpha 303i #293636078 for sale

TEL / TOKYO ELECTRON Alpha 303i is a diffusion furnace and associated accessories designed for production processing of semiconductor chips. TEL ALPHA-303I is capable of diffusion processing at temperatures of up to 1200°C, making it suitable for both shallow and deep junction formation. Features that enable process customization include: furnace source power supply design for over-temperature protection, a full-range feedback process equipment, and independent control of multiple temperature zones. Advanced interlocks and diagnostics are also included with the 303i's Human-Machine Interface (HMI) to provide users with flexibility, safety, and productivity. Its efficient diffused retort chamber design ensures uniformity of the process while maintaining an excellent uniformity profile. Further, the 303i has superior RF generator performance that can be tuned to specific layers and application requirements. TOKYO ELECTRON ALPHA-303 I is fitted with advanced environmental protection features. These features include ultra-low water flow rates, dedicated coolant chiller systems, and ozone protection. Further, the system is equipped with a gas permutation unit for handling a wide range of gases for different process requirements. The gas permutation machine also works in conjunction with a gas analyzer to ensure that process parameters are well maintained. TEL / TOKYO ELECTRON ALPHA-303I also has essential vacuum pump solutions for controlling process contamination. The unit is powered by a high-capacity vacuum pump and an independent differential pressure gauge to ensure effective process control. Further, the unit has a multi-turnback maintenance tool for asset servicing and general maintenance. Overall, Alpha 303i is a large, powerful, and effective diffusion furnace and associated accessories. Its sophisticated technology ensures that the unit is suitable for a wide array of diffusion processing environments. With its accurate control and uniformity, TEL Alpha 303i is an effective and reliable solution for semiconductor chip production.