Used TEL / TOKYO ELECTRON Alpha 303i #293754732 for sale

TEL / TOKYO ELECTRON Alpha 303i is a diffusion furnace and accessorie used to create semiconductor quality products. It can be used in a variety of processes including diffusion, oxidation, and LPCVD. TEL ALPHA-303I has both manual and fully automated features which make it extremely easy to use. It is also suited for small batches of production, allowing for greater yields due to improved process control and monitoring. TOKYO ELECTRON ALPHA-303 I maximum power is 110kW, with adjustable output and temperature profiling. The chamber dimensions are a diameter of 35.4 cm and a depth of 35 cm with the maximum substrate size at 300mm diameter. The furnace has 6 heating zones with heated susceptors and a full nitrogen capability. This allows for target studies such as evaluations of oxidation, impurity diffusion, silicidation, and multilayer deposition. In addition, high temperature process compatibility can be provided up to and above 1100°C. TEL Alpha 303i also has up to 6 gas input channels through the gas injection system and an optional in-situ metrology system that gives real-time feedback for controlling parameters such as temperature and the various gases used at various stages of the process. It can also accept various sources for heating including 50/60 Hz power and balanced/unbalanced AC power sources. Finally, TEL / TOKYO ELECTRON ALPHA-303 I features recipes that allow for easy recipe saving, editing and loading. This makes it extremely user-friendly for engineers, technicians, and production personnel alike. The equipment also has factory-installed safety features including E-Stop, over temperature and pressure alarms, and fire detection systems. TEL/TOKYO ELETRON ALPHA-303I is an excellent diffusion furnace and accessorie for a variety of semiconductor production applications. It's easy-to-use features make it a great choice for those looking to increase their production yields while conducting high quality processes.