Used TEL / TOKYO ELECTRON Alpha 303i #293766646 for sale

TEL / TOKYO ELECTRON Alpha 303i
ID: 293766646
Wafer Size: 12"
LPCVD Furnaces, 12".
TEL / TOKYO ELECTRON Alpha 303i is a next-generation diffusion furnace and accessories for the semiconductor and display industries. It is a fully automatic, high temperature, and ultra-high vacuum (UHV) focused ion beam (FIB) and sputter deposition equipment. TEL ALPHA-303I provides excellent performance with its high-resolution imaging, high throughput, and accurate control of sputter deposition, as well as its flexible process design for various applications. It can deposit, etch, and build device structures simultaneously. The automated system offers superior process uniformity and can be configured to achieve short manufacturing times. TOKYO ELECTRON ALPHA-303 I utilizes an in-line reactor suite providing thermal, radicals, and atoms at the highest temperature and vacuum levels with an improved design that greatly increases process accuracy and repeatability. The vertical multichamber design allows rapid, simultaneous temperature cycling for all chambers, and an exhaust unit efficiently removes any remaining oxygen, nitrogen, and other possible contaminants. An optional to machine is TEL Multi-source Ion Implanter which is an advanced implantation technology offering the benefits of a variety of implanting modes including dual-beam, group array, and single area modes. This tool can provide unprecedented high dose accuracy and uniformity, as well as low beam-off time. ALPHA 303 I is also equipped with an advanced wafer loading asset designed to achieve faster and safer wafer transfers. With a combination of Automatic Perception Model and Automatic Wafer Retrieval Equipment, the wafer loading system can reduce wafer handling time and prevent foreign material contamination. This user-friendly unit is compatible with TEL / TOKYO ELECTRON ALPHA-303I process rules and enables fast deployment, with a high level of process control and in-machine analysis. ALPHA-303 I can be integrated with other systems including an automated Stepper, AFM, and Imaging tool. Alpha 303i is an excellent choice for manufacturers wanting reliable, cost-effective methods for welding wires, making circuits, and creating layer by layer deposition. With its advanced asset design, ALPHA-303I can offer a highly efficient and reliable solution for high throughput needs.
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