Used TEL / TOKYO ELECTRON Alpha 303i #293829711 for sale

TEL / TOKYO ELECTRON Alpha 303i
ID: 293829711
Vertical diffusion furnace.
TEL / TOKYO ELECTRON Alpha 303i is a thermal diffusion furnace and accessory used to process wafers and other substrates at temperatures up to 1100 degrees Celsius. This tool utilizes a double-zone heat zone with rapid thermal gradients which allow for faster production time, higher temperatures, and greater yield. TEL ALPHA-303I's core components include a heated chamber, a gas transfer ring, and a temperature control module. An automated substrate handling equipment presents a uniform substrate to the process chamber for pre-heat, etch and deposition. In addition, it also offers an integrated water-cooled and forced exhaust ventilation system. TOKYO ELECTRON ALPHA-303 I is equipped with the latest Thermco Series III controller which features advanced programming parameters and options to facilitate precise subsurface temperature and process optimization. Its built-in pressure sensors monitor the furnace door pressure and thermal nitride exhaust pressure in order to help ensure tight process control. The automation aspect of the unit further simplifies the diffusion rates and temperature uniformity in the process chamber. Additional features include a handy floor-level hot-gas bypass and exhaust fan control, which provides a manual override to ensure safe operation. The furnace is also equipped with advanced safety mechanisms, such as a flame detection machine, which automatically shuts off the power supply when dangerous levels of flammable gas are detected. TEL Alpha 303i is incredibly efficient and requires minimal maintenance, making it a great option for businesses looking for an efficient and reliable diffusion furnace. It provides uniform, repeatable results and achieves high-quality wafer and substrate processing. The combination of safety features, high-end process optimization, and ease of use helps to reduce overhead costs and production time, making TOKYO ELECTRON Alpha 303i a great choice for manufacturers looking for a dependable diffusion furnace.
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