Used TEL / TOKYO ELECTRON Alpha 303i #9235827 for sale

TEL / TOKYO ELECTRON Alpha 303i is a diffusion furnace and collection of associated accessories designed for use in semiconductor fabrication. Utilizing a unique combination of advanced vacuum processing, wafer, resistance heating, and utility controls, the equipment is capable of greater precision, efficiency, and reproducibility for improved fabrication performance. The system is built around TEL ALPHA-303I chamber, with its fast cycle times and tight temperature control, ensuring superior results. TOKYO ELECTRON ALPHA-303 I features a 1,500-liter, machined stainless steel chamber for rapid multi-layer substrate diffusion processes, along with a highly efficient quartz bell-type susceptor and quartz halogen lamps for uniform temperature distribution. Its closed-chamber, double-door design enhances process control for improved product quality. At the heart of the unit's performance is TEL high-precision, linear-drive UPECB processing control. The UPECB self-adjusts to environmental conditions, which eliminates the need to continuously re-calibrate the machine. The UPECB also ensures precise gas/vacuum control for precise substrate temperatures, as well as improved uniformity within the chamber. TEL / TOKYO ELECTRON ALPHA 303 I comes with a suite of accessories designed to enhance its performance. To protect the chamber's interior from contaminants, the tool is equipped with an inertial particle cleaner, which circulates a stream of nitrogen over the work piece. Also included is a rotating quartz boat, which allows for faster and more uniform diffusion processing. To ensure performance and quality, ALPHA 303 I includes a chemical interface for automated processing, vacuum taps for monitoring and control, and a variety of safety systems and interlocks. To enable data logging and processing the asset includes a 7" touch-screen display with a built-in operator panel for easy control and in-depth process documentation. TEL ALPHA-303 I diffusion furnace is an essential tool for process engineers in the semiconductor industry, providing the accuracy, efficiency, and reproducibility to ensure maximum performance and product quality.