Used TEL / TOKYO ELECTRON Alpha 303i #9251681 for sale

TEL / TOKYO ELECTRON Alpha 303i
ID: 9251681
Wafer Size: 12"
Vintage: 2005
LPCVD Systems, 12" 2005 vintage.
TEL / TOKYO ELECTRON Alpha 303i (TEL) diffusion furnace is a high-performance unit designed for rapid, efficient diffusion of a wide variety of metals, alloys, and intermetallic compounds. It features an automated control equipment designed to provide rapid and precise repeatability of process parameters, making it an ideal choice for high-throughput diffusion processes. TEL ALPHA-303I features a particle-dissipating heat transfer system with three-zone support, each equipped with separate temperature control and a set of independently adjustable gas flows to support highly precise temperature control. The chamber is designed for fast thermal regeneration and includes an ult-high-dose particle collection unit designed to capture contaminants as small as 0.05 microns. TOKYO ELECTRON ALPHA-303 I is also equipped with a high-temperature ceramic reflector designed to direct radiation from the internal heaters for maximized heating efficiency, and oversized chamber walls designed to reduce radiation losses. Its low-inertia design ensures quick heating times and quick start-up times. TEL Alpha 303i is equipped with a user-friendly, menu-driven operator interface that makes it easy to access process parameters, monitor parameters, set time/temperature profiles, adjust gas flow rates, and set safety parameters. The touchscreen display also allows for detailed editing and remote monitoring via webserver. In addition to these advanced features, TEL / TOKYO ELECTRON ALPHA 303 I is also equipped with a number of safety features, such as thermal shutoff circuits, pressure safety switches, sealed gas connections, and extreme temperature alarms. These features make it an ideal choice for high-containment fabrication processes requiring the highest levels of safety and accuracy. Overall, ALPHA-303 I diffusion furnace is a reliable, efficient, and safe unit for processing a wide variety of metals, alloys, and intermetallic compounds. Its automated control machine allows for precise repeatability of process parameters, and its advanced safety features make it a desirable choice for high-containment fabrication processes.
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