Used TEL / TOKYO ELECTRON Alpha 303i #9251683 for sale

TEL / TOKYO ELECTRON Alpha 303i
ID: 9251683
Wafer Size: 12"
Vintage: 2003
LPCVD System, 12" 2003 vintage.
TEL / TOKYO ELECTRON Alpha 303i is a single-wafer diffusion furnace equipment that offers excellent performance for electronic device fabrication, specifically for advanced silicon wafers. It uses the latest technologies in diffusion, etching, and deposition processes. TEL ALPHA-303I features a wide variety of built-in accessories, including an automatic liquid delivery system, manual liquid filling, front and rear load locks, and an active front and rear opening. Additionally, there is an advanced slit valve design that helps ensure accurate processgas delivery and temperature accuracy. TOKYO ELECTRON ALPHA-303 I features an open and easy-to-use adjustable flow design. This allows for both independent and simultaneous control of front and rear flow. It also has an operating platform and corrosion-resistant chamber that can withstand temperatures of up to 220°C. The chamber of ALPHA-303 I is constructed from high-grade, corrosion-resistant materials, which make it highly reliable and durable. Furthermore, it utilizes a vertical-type direct-heating element for optimal uniformity of furnace temperature. TEL ALPHA-303 I has an improved temperature uniformity of ± 2 to 3°C in the range of 750 to 1100°C thanks to its high-yield, three-zone heating drape unit with multiple zone temperatures. It also utilizes a variety of gases including N₂,CO₂, S₂O₂,CF₂,O₂##, H₂,NH₃, and SF₆, making it a truly multi-purpose diffusion furnace. Furthermore, TOKYO ELECTRON ALPHA-303I has several safety features designed to ensure the safety of the user, including a key-lockable start/stop mechanism, an automatic contact check machine, and an optical inspection tool. The optical inspection asset ensures that the chamber remains free from contamination. TEL / TOKYO ELECTRON ALPHA 303 I is an incredibly efficient diffusion furnace model that offers superior performance. It is designed for high throughput and accuracy, resulting in better quality and faster process cycles. With its unique design, advanced accessories, and highly reliable safety features, it is an excellent choice for any electronic device manufacturer.
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