Used TEL / TOKYO ELECTRON Alpha 303i #9251688 for sale

TEL / TOKYO ELECTRON Alpha 303i is a high-performance diffusion furnace and accessory designed for use in semiconductor fabrication processes. It can perform a variety of tasks including substrate doping, shallow trench isolation (STI), and wafer debonding. The furnace is equipped with a state-of-the-art vertical reactor that ensures precise temperature and uniformity throughout the chamber. It has a maximum temperature of 1,800¬∞C and a uniformity of ±2¬∞C throughout the process chamber. It also features a high-speed water cooling equipment for quick and efficient cooling. TEL ALPHA-303I is an advanced furnace equipped with a range of features for maximum efficiency. It has a highly configurable memory with up to 64 different recipes that can be stored and recalled quickly and easily. This allows for efficient operation and fast turnaround times. It is also equipped with a real-time monitoring and control system that tracks the process parameters in the chamber and ensures that the process is occurring under optimal conditions. In addition to its process capabilities, TOKYO ELECTRON ALPHA-303 I also offers excellent safety features. It is constructed with an advanced insulation unit with multiple layers of insulation for maximum thermal protection during operation. The furnace is also equipped with a number of interlocks for safety as well as emergency shut-off valves which shut off the gas and electric power in the event of an emergency. TEL Alpha 303i comes with a full suite of accessories including an AFM unit, a carrier elevator for transferring wafers between chambers, and a wafer alignment machine. This allows for maximum flexibility when setting up the tool and ensures that wafers are loaded and unloaded quickly and accurately. In conclusion, Alpha 303i is a state-of-the-art diffusion furnace and accessory that offers excellent features for high-performance and safety. It is equipped with advanced temperature control and monitoring capabilities, fast processing capabilities, and a range of accessories to enhance its functionality. It is an ideal choice for anyone requiring a reliable and efficient diffusion furnace.