Used TEL / TOKYO ELECTRON Alpha 303i #9269364 for sale
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ID: 9269364
Vintage: 2008
Vertical diffusion furnace
I/O Unit: EFEM
Vacuum box
Heater
Back door
I/O Top cover (Top front)
FNC Top cover (Top rear)
Load port
Operation panel
Power box
Power box reck
Vacuum box cover
Front cover
Weight steel plate
2008 vintage.
TEL / TOKYO ELECTRON Alpha 303i is a diffusion furnace and accessory designed and manufactured to meet the needs of the microelectronics industry. It is a single wafer furnace that provides maximum temperature control, minimized downtime, and improved yield. TEL ALPHA-303I boasts a single wafer process chamber that is purely constructed out of stainless steel, providing excellent performance and long lasting stability. The unit features an integrated design with a 3-way, 270-degree rotation, enabling uniform heating across the wafer's upper and lower surfaces. The heating equipment uses highly advanced Indirect Heating Elements that are constructed with a combination of high-end resistance elements and ceramic heaters, enabling a large temperature range of up to 1300°C. TOKYO ELECTRON ALPHA-303 I uses a revolutionary, 16-zone atmosphere control system composed of Radial-Flow Type Preparation Chamber and Alloy Gas Exhaust Cells. The temperature in each of the 16 zones are independent and continuously monitored, allowing for closer temperature control along with decreased thermal productivity. Its proprietary RAD-setting inner wall structure also eliminates the need for coolant radiators, thus greatly reducing costs. TOKYO ELECTRON ALPHA-303I's high-end options provide even greater efficiency and productivity. It features an advanced power supply converter, offering a wide range of output current that can be utilized to achieve desired temperatures. In addition, its high-precision Mass Flow Controller and Triple-valve control unit maintain a stable internal atmosphere while utilizing a broad range of gas options. TEL / TOKYO ELECTRON ALPHA 303 I is designed to provide several additional functions. Its built-in lock-down button, emergency warning circuit and auto-stop machine are designed to prevent accidents and secure a safe operation environment. Its advanced safety alarm tool also issues a warning when necessary. ALPHA 303 I is the perfect choice for any microelectronics laboratory. It provides reliable heating temperatures with excellent control and stability, all in one highly efficient package.
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