Used TEL / TOKYO ELECTRON Alpha 303i #9350835 for sale

ID: 9350835
Wafer Size: 12"
Vintage: 2004
Nitride furnace, 12" K-Type 2004 vintage.
TEL / TOKYO ELECTRON Alpha 303i is a state-of-the-art diffusion furnace used for semiconductor manufacturing. It is designed to perform thermal oxidation, an essential process in the fabrication of integrated circuits. This powerful and reliable furnace has a maximum temperature of 1350°C and can accommodate wafers up to 8 inches in diameter. TEL ALPHA-303I is made from high quality materials that are resistant to oxidation and deformation at high temperatures. It features precise temperature control and excellent stability for uniform heat distribution. The built-in inert gas supply equipment also eliminates oxygen contamination during oxidation process. This ensures superior film uniformity and significantly improved yields. TOKYO ELECTRON ALPHA-303 I provides a wide range of process control features. It has a digital controller, alarms, sensors, and a feedback system that ensure constant process execution, even during power shortage or minor component failures. The chamber is made of single-piece stainless steel, for effective maintenance and high reliability. Its oxidation specifications are within 0.5% of original wafer specifications. The furnace also offers a number of accessories for more efficient and cost-effective production. This includes two additional conveyors with a wafer capacity of 3,000 each, and an automated loading unit. The automated loading machine features an RFID reader, temperature monitor, speed adjuster, and wafer holders for precise programmable placement. TEL ALPHA 303 I is a high-performance diffusion furnace that offers ease of use, superior reliability, and precise temperature control. Its incorporated accessories make it ideal for large-scale production. With its reliable design and superior performance, TEL Alpha 303i is the perfect choice for the fabrication of reliable and high-performing integrated circuits.
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