Used TEL / TOKYO ELECTRON Alpha 303i #9353373 for sale

TEL / TOKYO ELECTRON Alpha 303i
ID: 9353373
Wafer Size: 12"
Furnace, 12" Poly cure.
TEL / TOKYO ELECTRON Alpha 303i is a high-performance diffusion furnace and accessorie designed for use in a variety of manufacturing and laboratory applications. This equipment is an advanced equipment for creating small, intricate structures for semiconductor production, particularly CMOS, BiCMOS, and BiMOS devices. TEL ALPHA-303I measures 82 inches (2.1 m) in length and 43.3 inches (1.1 m) in height, making it a large but relatively space-efficient device. It weighs 5 water-filled tons and includes a 32-position water strip chuck, a rear telescopic chamber, dual-cyclone cyclone recirculating system, and a purifier centrifugal separator. The diffusion furnace is equipped with multiple carriers in the front and rear to accommodate up to five wafers at once and an atmosphere exhaust unit to create a controlled atmosphere. TOKYO ELECTRON ALPHA-303 I is designed to provide superior processing efficiency and throughput with a programmable, high-speed heater and independent kettle operation. It includes a multispectral controller for precise temperature control, a real-time monitor, a vacuum interlock machine for safe operation, and an emergency shut-off switch that responds automatically to unsafe conditions. The advanced design of this model also allow users to evaluate halogen concentrations and adjust process parameters during operation. The superior performance and design of ALPHA 303 I makes it ideal for semiconductor processing. This state-of-the-art diffusion furnace and accessory provide precise temperature control and high throughput to ensure the reliable manufacture of intricate structures in a wide range of devices. This advanced tool features an intuitive controller, emergency stop switch, and self-diagnosis asset, making it a popular choice for reliable, efficient, and precise semiconductor production and research.
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