Used TEL / TOKYO ELECTRON Alpha 303i #9398273 for sale

TEL / TOKYO ELECTRON Alpha 303i is a high performance diffusion furnace that is used for sophisticated equipment for terminal oxidation and CVD. The device is especially designed for the production of semiconductor devices, including dynamic random access memory (DRAM), flash memory, and microelectronic device fabrication. This diffusion furnace has many features, such as an impressive temperature uniformity of ±2°C, a precise temperature control with a pointing accuracy of ±1°C, and a wide temperature range of 200°C - 1200°C. Additionally, it has a lightweight and compact wafer-heating bowl design with an arc-shape to enable fast wafer heating. Furthermore, TEL ALPHA-303I is equipped with various accessories such as a multi-gas dock, a gas panel, and other peripheral instruments. It is also integrated with a TEL Glove Box to enable effective handling of wafers, process gas supply, and control of vacuum generation. Additionally, the alphabet soup edging tool enables smooth edge profile on the processed portions. TOKYO ELECTRON ALPHA-303 I is also equipped with a Equipment Controller that allows for easy and reliable operation and monitoring. This includes an intuitive operator interface and a self-diagnosis system that can detect errors automatically. It also has a high pressure shut-off unit for protecting wafers from damages caused by over-pressurization. Lastly, TEL / TOKYO ELECTRON ALPHA-303 I is powered by a DC Bias Machine, allowing for the processing of FinFET devices. All in all, TEL Alpha 303i is a powerful and reliable diffusion furnace that is highly suitable for the fabrication of semiconductor devices. It offers a high degree of temperature uniformity and accuracy, as well as various accessories for easy operation.