Used TEL / TOKYO ELECTRON Alpha 8 #293816668 for sale

TEL / TOKYO ELECTRON Alpha 8 is a high-performance diffusion furnace designed for supporting the most advanced MEMS material processing technologies. It features superior superior uniformity, excellent homogeneity and remarkable reproducibility for delivering ultra-high quality MEMS devices. This model has a load capacity of up to 8 inches wide, enabling a wide range of applications. Its elaborate design is built with multiple protective layers, starting from a quartz glass tube construction up to a specially coated stainless steel inner chamber. This ensures (1) excellent uniformity of temperatures within the chamber and (2) superior air flow characteristics for optimum oxidation control and uniform temperature distribution. Furthermore, a highly protective ceramic insulation layer is housed around the furnace chamber for added safety. The furnace can be operated either as a horizontal or vertical process chamber. Its compact design and detachable design make it easy to install and setup in any operation area. A low-odor, environment-friendly single-phase halogen refrigerant is used to keep the chamber temperature precisely stable over time. Compared to conventional diffusion equipment, TEL Alpha 8 offers outstanding performance with significantly lower energy consumption. This is made possible thanks to its advanced PID technology which allows for precision temperature control. In addition, the multi-stage temperature control system is capable of accurately controlling the diffusion properties in the furnace, while maintaining the desired ramp rate. The furnace also has other functions such as a built-in thermal sensor for monitoring gas pressure and uniformity. It also includes an infrared pyrometer for accurate temperature measurement. As a result, TOKYO ELECTRON ALPHA-8 diffusion furnace can guarantee superior product quality and delivers improved yield for an economical MEMS production.