Used TEL / TOKYO ELECTRON Alpha 8 #9243886 for sale

TEL / TOKYO ELECTRON Alpha 8 is a diffusion furnace and associated accessories that are specifically designed to support ultra-large scale integrated (ULSI) circuit fabrication. This state-of-the-art integrated toolset features an array of sophisticated technologies, such as a multi-gas delivery equipment, rapid thermal processing, and a multi-zone hot wall furnace. With these and other features, TEL Alpha 8 is an effective tool for creating cutting-edge ULSI technology. TOKYO ELECTRON ALPHA-8 diffusion furnace features a heated zone design with up to 8 loading slots to accommodate large wafer sizes. A multi-gas delivery system provides a variety of gases (such as N2, O2, and SF6) in order to clean the furnace and wafer surfaces as well as support doping and diffusing. This gas unit is controlled by a proprietary algorithm to ensure the most uniform and precise gas dispersion. The furnace utilizes a Rapid Thermal Process to quickly anneal, activate, imbed, and diffuse materials on the wafer surface. This advanced process can reduce process times significantly while also increasing uniformity, repeatability, and yield. To further enhance the process, TEL ALPHA-8 also features a multi-zone hot wall furnace that evenly distributes heat to wafers within a given zone. This ensures consistent temperature uniformity across the surface. TEL / TOKYO ELECTRON ALPHA-8 is a highly advanced diffusion furnace and accessory set that can help fabricators create ULSI technology with unprecedented speed and accuracy. Its multi-gas delivery machine, rapid thermal process, and multi-zone hot wall furnace provide superior performance and unmatched uniformity. With TOKYO ELECTRON Alpha 8, companies have an integrated toolset that gives them the edge in modern ULSI fabrication.