Used TEL / TOKYO ELECTRON Alpha 8 #9373152 for sale
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ID: 9373152
Furnace, 8"
Process: Alloy
I/O Port
(126) Process wafers
No load lock
25-Carrier slots
Boat type: Single
PS4100Z Controller
Operation screen: Touch screen
Gas flow chart: Front and rear
M120 Temperature controller
Controller transformer: 208 V, Single phase
Heater transformer: 208 V, 3-Phase
Gases:
Gas 1: PN2
Gas 2: FO (4%, H2/N2)
Gas distribution:
Basic style: Conventional
Tubing material: SUS-316L
Tubing finish: VCR
Air operated valve: FUJIKIN
AERA MFC
No cold trap
No pump line
Exhaust distribution:
Air operated valve type: VCR Connect
Main valve: FUJIKIN
Wafer / Cassette handling:
No wafer alignment
(16) Cassette storage
Cassette In/Out port
Cassette handling robot
Wafer transfer
Fork material: Ceramic
Elevator handling:
Boat elevator
Auto shutter
Boat rotation
Mechanical parts
Heating chamber:
Heater type: VMM-35-001
(5) T/C Type
(5) Spike T/C.
TEL / TOKYO ELECTRON Alpha 8 is a state-of-the-art diffusion furnace and accessories, ideal for small-scale engineering, material science and microelectronics applications. It combines high throughput, reliable production and superior performance in order to meet the most demanding requirements. TEL Alpha 8 uses a four-zone horizontal source and an advanced wafer belt design. This design enables an increased throughput of up to 36 wafers per hour with long process times. It features a panel view operation with a 10" color touch-screen for monitoring and controlling all system parameters. The unit can be programmed to self-adjust to different process conditions, making calibration fast and precise. TOKYO ELECTRON ALPHA-8 operates at a maximum temperature of 1045 degrees Celsius and features dual solid-state RF heating systems and multiple gas sources for precise temperature control. It also offers an inert gas-waveguide system that allows it to both heat and cool the chamber. The built-in safety features include microcomputer-controlled interlocks, pressure monitoring, temperature monitoring, and a special low-temperature emergency stop system. TEL / TOKYO ELECTRON ALPHA-8 features a wide range of accessories, such as gas panels, pressure controllers, a process monitor, a data recorder, and separate expander and loading units. A heated sample load-lock is also available, allowing for a rapid temperature transition from one process to another. The unit is designed to meet the most stringent international safety requirements and is designed to stand up to daily wear and tear. Overall, Alpha 8 is an excellent choice for researchers and engineers who require a safe and reliable diffusion furnace. It offers superior performance and precision control for a wide variety of materials science and microelectronics applications, and its sophisticated operation and unique design features make it one of the leading furnaces on the market today.
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