Used TEL / TOKYO ELECTRON Alpha 801C #9396147 for sale

TEL / TOKYO ELECTRON Alpha 801C is a next-generation diffusion furnace and accessory equipment designed for fabs aspiring to move to advanced nodes. It provides sophisticated micro-processing technology and unparalleled performance levels in wafer fabrication, making it an ideal choice for the most difficult tasks in aluminum metallization and various other processes. The system enables the fabrication of high-quality, extremely thin films with tight dimensional control and high density. This is achieved through its advanced diffusion engineering, oversized gas flow and temperature uniformity. TEL Alpha 801C also features a large-size graphite boat and pre-heating zones. TOKYO ELECTRON Alpha 801C comes equipped with a powerful, automated control unit that ensures excellent performances. This lets the user strike an ideal balance between speed and temperature non-uniformity, while making sure the process conditions are always under control. The central control unit showcases a large technical display with remote diagnosis capabilities, making it very easy to access, monitor, and control the process. Alpha 801C also features a series of exceptional safety and preventive maintenance capabilities. It has an ultra-flexible platform, allowing easy integration into any standard process. An effective leak-detection machine ensures maximum protection against high-temperature accidents. Heating elements are also monitored to avoid unnecessary damage in the event of overheating. TEL / TOKYO ELECTRON Alpha 801C comes with a series of advanced gas flow and temperature uniformity capabilities. Variable-flow capability lets the user maintain a given gas flow irrespective of tool pressure, providing higher uniformity during process runs. The asset also includes a versatile temperature control option to ensure accuracy and precision. All in all, TEL Alpha 801C is an outstanding diffusion furnace and accessory model designed to meet the stringent process requirements of advanced nodes. It offers high levels of performance and exceptional uniformity. Its intuitive control equipment, integrated safety, and preventive maintenance capabilities make it an excellent choice for any fab looking to move into advanced nodes.