Used TEL / TOKYO ELECTRON Alpha 801D #293806761 for sale

TEL / TOKYO ELECTRON Alpha 801D is a diffusion furnace and accessories suite for use in fabrication of integrated circuits (ICs) and discrete semiconductor components. It is designed to drive high-level integrated circuit fabrication technology, characterized by high speed, high repeatability, and high uniformity of results. TEL Alpha 801D includes several components. All components include a touchscreen controller for user input and operator feedback. The user is able to program the process sequence and alter the settings in real time. This allows for customization to specific technologies. The furnace consists of an outer cabinet housing a horizontally configured quartz tube with variable support heights. The vertical and horizontal orientation can be adjusted for increased process uniformity. The quartz tube is equipped with two dual-stage axial-flow fans that allow both slow and fast flow (for fast anneal). The furnace also includes a gas equipment which can automatically energize the system with H2, forming gas, N2, Ar, or S-2. The furnace is designed for wafer size up to 300mm with a maximum process temperature of 1150°C. The diffusion unit includes a power supply, a source, and a wafer holder. The power supply utilizes a medium frequency inverter and high-speed switching technologies, enabling high precision process control. The source contains a high density resistive target and a motorized quartz tube, allowing the user to switch between target materials such as boron, silicon, and phosphor without manual change-over. The wafer holder is designed for positive pressure and flatness control. The holder utilizes a motorized base and a multi-zone heater machine, allowing the user to adjust the temperature across multiple wafers independently. TOKYO ELECTRON Alpha 801D offers wireless communication between the control tool and remote sites. This allows users to share data and programming, and monitor processes in real time. An inspection asset is also included which can be used to monitor critical process parameters. Alpha 801D diffusion furnace and accessories suite is a powerful and reliable tool for IC and semiconductor work. It offers automation, high precision, and improved uniformity for improved efficiency and output. The model is designed for very large wafer sizes, making it suitable for a variety of applications.