Used TEL / TOKYO ELECTRON Alpha 803 #293609357 for sale

TEL / TOKYO ELECTRON Alpha 803 is a high-performance diffusion furnace, designed for innovative processes and optimized for high-end semiconductor device development, precise production and cost-effectiveness. TEL Alpha 803 is equipped with a high-speed digital signal processor (DSP) for precise temperature control and parameter optimization. The maximum temperature of 1100°C with 3°C uniformity is achieved through its helium-cooled, quartz-tube chamber with four-sided insulation, making it suitable for mass production of advanced semiconductor devices such as microprocessors, memory chips and power transistor. This diffusion furnace is unique in its compatibility range, supporting a wide variety of semiconductor materials and substrate combinations. The temperature range of TOKYO ELECTRON Alpha 803 is 50 to 1100°C, making it suitable for device-level diffusion processes. With dual-zone heating, the temperature difference between different parts of the wafer can be controlled more precisely and efficiently. The furnace is also equipped with a rapid response system, which increases thermal uniformity across the slab and enables rapid heating without thermal damage. Alpha 803 comes with a set of advanced accessories, including a vaporizer for solvent vapor treatments, an oxidation/combustion chamber for high-frequency plasma treatments, and a reaction monitor for monitoring chemical reactions and giving feedback on diffusion rates. TEL / TOKYO ELECTRON Alpha 803 also has an extremely low-pressure capacity allowing for ex-situ plating from the vapor chamber, even under extreme low-pressure conditions. This is particularly beneficial for wafer fabrication, as the plating rate is faster and the damage to devices is minimized. TEL Alpha 803's automated active cooling system enables high temperature stability and uniformity, foresightful systems scalability, as well as an auto-detected exhaust duct for high-flux evacuated processing. The furnace's built-in program log functions are also useful for tracking and recalling past processes and history records, allowing for effective process optimization. TOKYO ELECTRON Alpha 803 is a user-friendly, reliable and powerful diffusion furnace suitable for high-end semiconductor device fabrication and production. With its advanced features, it is capable of producing high-quality wafers with extremely low-temperature deviations, which is essential for microchip implantation. As a result, Alpha 803 is especially useful for industries with large-scale production requirements.