Used TEL / TOKYO ELECTRON Alpha 803D #9261383 for sale

TEL / TOKYO ELECTRON Alpha 803D is a highly advanced diffusion furnace and accessories equipment that is designed to provide film deposition and ion implantation processes for microelectronic device fabrication. It is a dual-chamber, vertical mobility enhanced diffusion furnace system which offers superior process control that allows for optimal film growth within feasible deposition timeframes. TEL Alpha 803D diffusion furnace unit features a unique single-source, dual-chamber furnace design that works with both mass-limited and heavy-load processes to provide improved uniformity, a more effective thermal machine, improved fluxes of precursor species, reduced layer thickness variations, and superior diffusion performance. Additionally, TOKYO ELECTRON Alpha 803D tool includes a high-end Programmable Logic Controller (PLC) that offers complete control of all asset functions, including temperature, pressure, and time settings, as well as embedded safety features for personal protection. The furnace chamber of Alpha 803D model is made from .04-inch (1-mm)-thick stainless steel and offers a temperature range of 100 to 1,200 degrees Celsius (212 to 2,192 degrees Fahrenheit). The chamber is further equipped with MIMOT-enhanced control technology, which is designed to provide flexibility and precision when controlling the temperature and uniformity throughout the chamber. The Enhanced Mobility Technology (EMT) is an exclusive mobility control equipment, which works to produce highly uniform, fine and repeatable deposition rates while providing an increased diffusion lifetime. With all of its advanced features, TEL / TOKYO ELECTRON Alpha 803D system offers superior accuracy, uniformity, and repeatability during deposition, etching, and implantation processes. TEL Alpha 803D unit also features a complete line of specialized accessories, including in-situ sensors, a high-efficiency particle analysis machine, a real-time optical diagnostics tool, and a multi-channel gas delivery equipment. These accessories dramatically enhance the asset's flexibility and performance, while offering an exceptionally high degree of safety and reliability. In addition, TOKYO ELECTRON Alpha 803D model includes an advanced CVD chamber, which works to produce the highest degree of quality and deposition uniformity in order to enable a wide variety of device fabrication applications. Overall, Alpha 803D equipment is an ideal choice for advanced microelectronic device fabrication. It features an exceptionally high degree of temperature and uniformity control, unmatched flexibility with its CVD and MIMOT-enhanced control technology, and a complete line of specialized accessories to provide an efficient and reliable fabrication experience.