Used TEL / TOKYO ELECTRON Alpha 803D #9290885 for sale

TEL / TOKYO ELECTRON Alpha 803D is an advanced diffusion furnace designed specifically to meet the needs of the semiconductor industry. TEL Alpha 803D is built for maximum reliability and offers top-of-the-line performance and features. TOKYO ELECTRON Alpha 803D is an all-in-one diffusion furnace, incorporating all of the essential components into a single unit for easy setup and operation. Alpha 803D can accommodate up to seven wafers simultaneously, and is capable of operating up to 800°C with a gas flow rate of 30 liters per minute. It allows for high-precision deposition processes such as diffusion, oxidation, and nitridation. TEL / TOKYO ELECTRON Alpha 803D also offers precise temperature control for evenly distributed heating throughout the chamber. Additionally, TEL Alpha 803D includes a built-in gas system with an automatic pump-down function to control venting after each deposition process is complete. TOKYO ELECTRON Alpha 803D comes with a number of features that help ensure safety and efficient operation. It includes a titanium alloy chamber and quartz windows that protect against potentially dangerous gases, while an ignition interlock prevents operators from running the furnace when the door is open. Alpha 803D also includes a safe-start timer to control the start sequence. Other features include an open system architecture and online monitoring capabilities, allowing the operator to view and control the process from a remote location. TEL / TOKYO ELECTRON Alpha 803D also includes an onboard automatic cassette loader and unloader for large scale application production. Finally, TEL Alpha 803D is compatible with a range of accessories, such as an RF plasma source and mass flow controllers, that further enhance its capabilities. TOKYO ELECTRON Alpha 803D is an ideal choice for semiconductor processing and deposition applications due to its reliability, performance, and features. Its upgrades and comprehensive safety systems make it a must-have for any fabrication facility.