Used TEL / TOKYO ELECTRON Alpha 803SC #293622215 for sale

TEL / TOKYO ELECTRON Alpha 803SC is a diffusion furnace with accessories used to produce low-cost integrated circuit (IC) wafers. It is designed to handle a variety of diffusion needs, including oxidation and thermal oxidation processes, while providing high-precision process control. The 803SC equipment consists of an eight-inch wafer supply module and a wafer treatment system. The wafer supply module contains a high-precision horizontal furnace chamber, together with a power supply, an evacuation unit and a gas distribution machine. The gas distribution tool provides the proper atmosphere for thermal oxidation, and is precisely adjustable for temperature, pressure and flow. The wafer treatment asset utilizes a combination of a gas box and a non-magnetic isolation module, as well as a rotating arm, an X-Y wafer platform and an RV track, allowing for both single-wafer and batch-processing. TEL Alpha 803SC features a power supply that provides highly uniform heating to the wafer by controlling the output of the furnace chamber. In addition, the 803SC includes a gas supply model that allows for exact control of the partial pressure of oxygen essential for thermal oxidation processes. The furnace is designed to provide the most accurate temperature control to ensure uniform oxidation. A heat resistive refractory chamber and forced air cooling equipment maintain a uniform temperature profile across the entire chamber. The 803SC system is also equipped with a variety of safety features to ensure safe operation. This includes a temperature check control unit, an oxygen monitor/alarm, a vacuum monitor/alarm, and a pressure safety valve. Each of these components is designed to protect the operator, the wafer, and the chamber from any damage or malfunction in the event of an unexpected occurrence. As an added level of assurance, the furnace is also constructed of advanced corrosion-resistant stainless steel that is capable of withstanding extreme temperatures and chemicals. With the 803SC unit, users are able to maintain tight process control and deliver consistent, high-quality results. The 803SC is well-suited for the production of ICs in a wide range of applications, from consumer electronics to automotive products and medical equipment.