Used TEL / TOKYO ELECTRON Alpha 803SC #293651969 for sale

TEL / TOKYO ELECTRON Alpha 803SC is a diffusion furnace and its associated accessories. It is a high-performance horizontal thermal processing furnace designed to process various materials in a variety of ways. The 803SC is an effective and efficient tool used to process semiconductor wafers. TEL Alpha 803SC comes with a quartz tube that runs horizontally through the center of the processing chamber and is protected by a quartz casing. It has an adjustable set point temperature ranging from 200 to 1175 degrees Celsius and a processing temperature up to 1200 degrees Celsius. The processing tube is 48 inches in length and can fit up to two 25 inch wafers. The tube is equipped with two movable electrodes that allow for uniform and even heating from end to end. In addition, the electrodes are mounted on rubber supports for secure operation. TOKYO ELECTRON Alpha 803SC also features a high-precision controller that can be used to manipulate parameters such as chamber pressures, temperatures, and purging/loading times. The controller includes a touch-screen graphic user interface and can be used to control the vacuum level in the chamber, enabling the operator to achieve accurate control of the parameters necessary for optimal processing conditions. The 803SC is also equipped with a Gas Control Module, which allows for the addition of gases into the process chamber, either to create a desired environment or to supplement a process. It is designed to be compatible with a variety of standard gases and is capable of controlling the mix of gases, ensuring that the process is completed with the desired results. The 803SC also comes with safety circuit components including a gas leakage detection system, as well as a thermal shutdown system to protect the equipment and personnel in the event of an emergency. Overall, Alpha 803SC is an effective and efficient thermal processing tool for semiconductor wafers. It has an adjustable set point temperature and a high-precision controller for accurate control of parameters. It also comes with safety circuit components and a gas control module for handling different gases.