Used TEL / TOKYO ELECTRON Alpha 803SD #293622216 for sale

TEL / TOKYO ELECTRON Alpha 803SD diffusion furnace is engineered to provide excellent product uniformity and specialized oxidation and diffusion needs. This diffusion furnace can be used to drive a variety of processes, including thermal oxidation and diffusion, shallow junction formation, and gate oxides formation. TEL Alpha 803SD is a highly efficient, vertical type diffusion furnace with a wide process range. Its dual cassette shuttle design allows for increased throughput time by shortening process times and eliminating the need for manual transfer. A newly developed uniformity controlling system ensures effective Uniformity Control (UC) by applying a special UC program. TOKYO ELECTRON Alpha 803SD is equipped with an advanced thermal control system that maintains high-performance process control without sacrificing other processes. The thermal control system minimizes variations due to changes in environmental conditions while providing efficient process control. In addition, the multiple-bank setting function enables large-area processing and small-lot production with improved accuracy, enabling efficient, reliable processes. Alpha 803SD also features a low-temperature heat treatment function for obtaining desired RTA and low-thermal budget. This low temperature heat treatment allows for improved characteristics such as oxide stoichiometry control, control of dielectric/metallic interface and surface roughness. TEL / TOKYO ELECTRON Alpha 803SD also comes with various other features, such as chemical source back-filling, track and platform heating, automated chemical pumping, various I/O ports and vacuum regeneration systems. This wide range of features allows for increased flexibility and accuracy in the completion of a variety of processes. TEL Alpha 803SD diffusion furnace is an advanced product designed to meet the most demanding diffusion process requirements. Its wide process range and efficient controls ensure product uniformity, while its multiple-bank setting and low temperature heat treatment functions make it an essential tool for achieving various process goals with high accuracy.