Used TEL / TOKYO ELECTRON Alpha 805C #293642578 for sale
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ID: 293642578
Wafer Size: 8"
Vintage: 1994
Furnace, 8"
Process: TEOS
Wafer: Flat zone type
Gases configuration:
Gas supply:
Gas name / Pressure / Connection method / Unit
PN2 / 1/4" UJR / Utility box
O2 / 1/4" UJR / Utility box
TEOS / 1/4" UJR / Utility box
Exhaust:
Type of Exhaust / Flow rate
Scavenger exhaust / 3 m³/min
Process exhaust / 1 m³/min
Gas room exhaust / 1 m³/min
Cooling water:
Gas name / Pressure / Flow rate / Connection method / Used for
Furnace unit / 5 Kg/cm² / 15 / 3/4" SWG / Heater, flange
Power supply:
UPS:100 V, Single Phase, 3 kW (Controller)
Power: 208 V, 3 Phase, 30 kW (Heater chamber)
1994 vintage.
TEL / TOKYO ELECTRON Alpha 805C is a versatile diffusion furnace with an array of accessories to support a wide range of applications. It is designed to provide the most accurate temperature control available in a standard package. TEL Alpha 805C allows precise thermal processes of all substrates from 200 to 1250°C with a high uniformity across the wafer. It has oxidation, LPCVD, and Rapid Thermal Processing capabilities and can be supplemented with high temperature Nitrogen, Nitrogen Trimethyl Borate (NTMBS), Ammonia (NH3), Hydrogen, and Chlorine. TOKYO ELECTRON Alpha 805C series of diffusion furnaces feature an innovative heater winding system that ensures accurate temperature management and uniformity. This system helps reduce gas consumption through better temperature control and is highly efficient, providing maximum operating temperatures for oxidation and LPCVD processes. To maximize temperature uniformity, two gas zones provide precise temperature control across the wafer. The design also helps control the furnace atmosphere and reduce any thermal gradients. Alpha 805C is engineered for fast and efficient operation and is capable of high throughput production. It has a quick cycle time and can handle large production lots with short cycle times. For safety purposes, the furnace is constructed with robust safety sensors that can detect any over-current, short-circuits, and inconsistencies in process gases. With its large in-situ hybrid hydrocarbon scrubber, TEL / TOKYO ELECTRON Alpha 805C provides clean environment for safe and efficient operation. The furnace is also designed with cooling condenser options and can be fitted with external exhaust fans to help reduce the temperature fluctuations inside. The 7-segment color display on the control panel provides clear indications of the status of the furnace operation. TEL Alpha 805C is also capable of multi-step operation and process recipe generation. TOKYO ELECTRON Alpha 805C is an ideal option for large volume production applications and provides excellent temperature control, fast turnaround times, and superior uniformity. With its customizable design and variety of features, users can easily customize to fit their exact needs. Alpha 805C is the perfect choice for diffusion processes and high-precision thermal processes.
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