Used TEL / TOKYO ELECTRON Alpha 805CN #293622165 for sale

TEL / TOKYO ELECTRON Alpha 805CN is an advanced diffusion furnace and its accessories designed for use in silicon fabrication and related processes. The 805CN is an ultra low temperature diffusion furnace that offers extremely precise temperature control, reduced emissions output, and improved uniformity. The 805CN is a modular equipment, with 8 individual furnace stacks, each of which can be independently monitored and operated. TEL Alpha 805CN has a maximum temperature of 1350°C, with a heating power up to 18 kW. The diffusing chamber comes with a built-in gas supply and an exhaust system, enabling the precise and efficient diffusion of gases such as fluorine and oxygen, as well as other special gases like silicone. It is also equipped with an advanced digital communications interface for remote monitoring. The 805CN features an innovative software package, as well as a powerful control unit, enabling sophisticated process control. This includes temperature optimization, data logging, automated control, and alarm management. The powerful control machine is designed to enable precise and accurate preset temperature settings, as well as to help ensure uniform temperature distribution throughout the diffusion chamber. A variety of accessories are provided with TOKYO ELECTRON Alpha 805CN. The carrier module is designed to ensure a uniform atmosphere throughout the chamber, enhancing the uniformity of the diffusion process. A variety of thermocouples, sensors and connectors are also provided for accurate temperature readings and control. The diffusion chamber also features a convection-reducing cover and a heat radiation shield, which help reduce thermal energy losses, improve tool efficiency, and minimize particle contamination. The 805CN furnace can also be used with additional accessories, such as a quartz boat and bell cooling jet, to help ensure a uniform cooling atmosphere. Alpha 805CN is a versatile asset suitable for a wide range of diffusion processes. It is particularly well-suited for applications requiring very low processing temperatures and extremely precise temperature optimization. With its advanced digital communications interface and varied accessories, the 805CN is an excellent choice for silicon fabrication and related processes.