Used TEL / TOKYO ELECTRON Alpha 805CN #293622212 for sale

TEL / TOKYO ELECTRON Alpha 805CN is a CVD/PECVD multipurpose diffusion furnace, ideal for semiconductor materials fabrication. This state-of-the-art diffusion furnace features a high temperature of 900°C, with a large processing chamber suitable for accommodating multiple wafers of various sizes. Furthermore, it has precision DC heating capabilities to enable precise temperature control. The diffusion furnace has superior safety features, such as overheat detection and leak detection. It also features a low thermal noise and clean exhaust system, ensuring a safe and clean work environment. In addition, it contains a broad range of accessories, including an auto gas flow meter, an ultra-thin high temperature heater, and an improved vacuum thermal chamber lid for leak tightness. The diffusion furnace offers great flexibility for operations. The addition of an auto control system enables an efficient and automated operation, eliminating the need for manual operation. In addition, wafer handling is made easier through the incorporation of an advanced auto transport system. TEL Alpha 805CN also benefits from its improved process control, with an increase in process accuracy and reliability through sensors that measure the temperature in the target chamber, as well as a real-time display on a monitor. It also has advanced digital registration, remote monitoring, and intellgent data logging capabilities, allowing users to access valuable information at any time. Overall, TOKYO ELECTRON Alpha 805CN is an efficient, reliable and safe CVD/PECVD diffusion furnace for semiconductor fabrications, offering great flexibility and improved process control for a clean and safe environment. Its user-friendly design makes it suitable for use in many industrial and research laboratory applications.