Used TEL / TOKYO ELECTRON Alpha 805CN #293651966 for sale

TEL / TOKYO ELECTRON Alpha 805CN is a diffusion furnace designed to maximize efficiency. This robust and reliable furnace offers uniform temperature control, fast heat up, and precise control of important parameters. TEL Alpha 805CN is suitable for various diffusion applications like epitaxial growth, silicidation, poly-silicon deposition and implant. Its features include an efficient irregularly-shaped quartz tube, a high-temperature design, a Multi-Ion-Liner (MIL) wafer holder and E-type temperature sensors. TOKYO ELECTRON Alpha 805CN is capable of reaching 1600°C in just four minutes and uniform temperature control across the entire wafer surface. Alpha 805CN also supports the SAGF (Substrate Assist Gas Flow) process for further uniformity in temperature control and in the deposition of poly-silicon. The multi-zone MEL (Multi-zone External Lift) enhances uniform temperature profile, as well as repeatable and controllable growth processes. The precision temperature control of TEL / TOKYO ELECTRON Alpha 805CN is achieved through the use of temperature controllers; temperature sensors and thermal sensor technology. The E-type temperature sensors offered by TEL Alpha 805CN are capable of measuring temperatures from lower than room temperature to 1600°C. This furnace also offers the option to use the L (Length) type temperature controller - a flexible, affordable and efficient device that guarantees accurate temperature control and uniformity. For a multi-zone approach, TOKYO ELECTRON Alpha 805CN offers a 4-zone segmentation that can also be easily connected and externally controlled. This furnace also offers various options to configure and design your own recipe(s) for diffusion. Additionally, Alpha 805CN offers a chemo-mechanical lifter (CML), a LIN (Low Internal Pressure) system and multiple gas flow control options. TEL / TOKYO ELECTRON Alpha 805CN also offers the following safety features: an overload protection switch, an electrical reclosers, an automatic low pressure detector, an automatic high temperature detector, an emergency thermocouple and air cooling for the quartz tube. These features ensure a safe operation of the furnace and reduce potential risks associated with diffusion process. Overall, TEL Alpha 805CN is an efficient solution for metallization, epitaxy and other diffusion process. It is well equipped with the necessary components to enable quick, efficient and accurate operations for a variety of applications.