Used TEL / TOKYO ELECTRON Alpha 805D #293806762 for sale
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ID: 293806762
Furnace
Gas box
Exhaust box
Jig heater parts
(2) Pallets:
Heater
Quartz.
TEL / TOKYO ELECTRON Alpha 805D is a diffusion furnace and accessorie used for the production of semiconductor chips and other electronic components. It is designed to provide high temperature and high precision for a wide range of applications such as doping, thermal oxidation, and annealing. TEL Alpha 805D is specifically designed for high temperature operation and can reach temperatures of up 1800°C. Its ability to accurately reproduce temperatures makes it ideal for production processes of a high volume. The system is equipped with a temperature controller that has precise high-thermal-constant capabilities, allowing uniform thermal distribution and thermal gradients within ±2°C, enabling the furnace to operate at the highest levels of accuracy and precsion. TOKYO ELECTRON Alpha 805D can be used for a range of diffusion operations including light scission doping (LSD), high pressure wet oxidation (HPWO), and low pressure dry oxidation (LPDO). LSD is a form of doping which uses a light gas to cause chemical reactions in the substrate material resulting in a quicker diffusion rate and lower thermal budget. HPWO is a process of oxidation which uses high pressure and wet oxidation agents such as oxygen or ozone gas which are pre-mixed into a solution, then pumped into the furnace. This allows for the oxidation process to be carried out more quickly and efficiently than with traditional methods. Finally, LPDO is a dry oxidation process which uses a low pressure, low temperature oxidation gas, such as nitrogen, and employs a lower thermal budget. With Alpha 805D, highly uniform, high temperature diffusion process treatments can be achieved with a high degree of precision. It is specifically designed to be used with a wide range of substrates and materials, including SiC substrates, GaAs, and GaN. In addition, TEL / TOKYO ELECTRON Alpha 805D is easily integrated into existing systems and can be integrated with VSC-8300, VSC-3000, and VSC-1800 control devices for enhanced precision and control. TEL Alpha 805D also features a number of safety features and protocols including automatic shutdown and emergency response functions to ensure the highest levels of safety and reliability. Additionally, the furnace is built with a stainless steel heating chamber and inert gas atmoshere for superior durability and harm reduction. Overall, TOKYO ELECTRON Alpha 805D diffusion furnace and accessorie is a versatile and reliable system which provides a range of features that can be used for a wide variety of applications. Its high levels of accuracy and precision, as well as its safety and reliability, make it an ideal tool for the production and manufacture of electronic components and semiconductor chips.
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