Used TEL / TOKYO ELECTRON Alpha 805DN #143861 for sale

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TEL / TOKYO ELECTRON Alpha 805DN
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ID: 143861
H2 ANL furnace.
TEL / TOKYO ELECTRON Alpha 805DN is a diffusion furnace and accessories designed for the industrial market. It is designed for heating, treating, and evaporating components on a high-temperature substrate. Its special feature is the ability to adjust its temperature with the alpha pellistor and thereby the process parameters, such as the evaporation pressure. TEL Alpha 805DN is a multi-cavity eddy-current furnace equipped with a 200 mm diameter and a 300-mm-diameter evaporation chamber. The hot zone is equipped with two independent graphite heaters, with a maximum temperature capability up to 1750°C, powered by a variable-frequency drive. As a safety feature, the furnace's temperature is monitored with a CVDO-TCP temperature control system. The dual-chamber TOKYO ELECTRON Alpha 805DN enables a wide range of process controls, such as the multiple-ion source and layer-control, with abundant process parameters, such as the dose rate, ramp-on-time, and heat-on-time. Also, an automated solid control for programmable growth rate, process time, and evaporation time, is available. Alpha 805DN also has other advanced features, such as the dual antechambers to perform source exchange without breaking vacuum, a gas injector unit to supply specified gas, and a movable quartz window to monitor furnace chamber performance. In addition, various sensors, such as the pyrometer, are attached as standard equipment, and many optional accessories, including single and double quartz tubes, remote control, and vacuum gauge unit, can be added per the customer's application. TEL / TOKYO ELECTRON Alpha 805DN is a powerful and reliable diffusion furnace. Its flexibility and range of process parameters offer the user optimal conditions to produce top-quality, precision components. TEL Alpha 805DN also provides exceptional safety, making it an ideal tool for industrial applications.
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