Used TEL / TOKYO ELECTRON Alpha 805DN #293622218 for sale

TEL / TOKYO ELECTRON Alpha 805DN is a diffusion furnace and accessories package that is designed specifically for the to microchip production. This package is a combination of a diffusion furnace, an exhaust equipment, and heated ambient air supply, allowing users to carry out high precision processes such as deposition, oxidation, annealing and etching on precision microchip substrates. The diffusion furnace features a vertical quartz tube and a top loader, to provide excellent wafer uniformity over temperature ranges of 800 - 1250°C. The powerful gas mixing system and high uniformity ensure tight control of film, trench and gap etching, while the edge insulation on the heater module and quartz tube prevents the oxidation of materials near the chip edge. The exhaust unit includes powerful roots blowers, a single- stage scrubber, and a dust removal filter, enabling rapid and efficient removal of process gases, particulate, dust and hazardous substances. The heated ambient-air supply allows users to quickly create the necessary environment for optimal chip performance. TEL Alpha 805DN is operated by a sleek control console that features user-friendly touch screen controls for temperature, pressure and gas inputs. The machine can also be programmed for repeatable process runs, allowing users to create a consistent, high-quality product. Additionally, embedded sensors allow users to monitor temperatures, pressures and process times, ensuring accurate and reliable performance every time. TOKYO ELECTRON Alpha 805DN is designed for high throughput production lines, and features a range of safety features, including a sophisticated PID controller and real time process log, protective mechanisms to minimise overheating and overheating, as well as doors with automatic interlock mechanisms. This package is suitable for the most challenging diffusion processes, and is an ideal high-volume production solution.