Used TEL / TOKYO ELECTRON Alpha 805SC #293622204 for sale

TEL / TOKYO ELECTRON Alpha 805SC is a high-quality diffusion furnace that provides precise thermal control and a wide temperature range for a wide variety of processes. It is a valuable tool for device manufacturing and other related industries. TEL Alpha 805SC is designed to meet the needs of the most demanding processes. It is capable of producing uniform, controlled temperature profiles with high uniformity and repeatability. The large chamber size enables simultaneous processing of several substrates. Additionally, the large chamber volume and rapid temperature ramping up to 950°C with ±2°C precision ensures consistent results for critical applications. TOKYO ELECTRON Alpha 805SC features a low thermal gradient to maintain uniform temperatures across the entire wafer surface. The chamber temperature is monitored and maintained in three temperature zones to ensure uniform heating. It also features a Multi-Point Furnace Interface that enables connection with wafer mapping systems, allowing for monitoring and control of up to 28 thermocouple sites. Alpha 805SC is also equipped with several safety systems, including nitrogen purging and water cooling, to ensure operator and system safety. Additionally, the furnace is designed with easy accessibility for maintenance and maintenance-free heating elements to guarantee uptime. TEL / TOKYO ELECTRON Alpha 805SC is a high-performance, reliable and highly advanced diffusion furnace with a wide range of applications. It is the perfect solution for semiconductor device fabrication and advanced processes such as LPCVD, ALD, RTP and HTM. Its precision temperature control, wide temperature range and high uniformity across the wafer surface make it an ideal choice for any advanced process.