Used TEL / TOKYO ELECTRON Alpha 808S #293775046 for sale
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ID: 293775046
Wafer Size: 8"
Vintage: 1995
Furnace, 8"
Process: Diffusion
CIM: Linked
Factory interface: SMIF
Handler system: Wafer transfer robot
1995 vintage.
TEL / TOKYO ELECTRON Alpha 808S diffusion furnace is a piece of semiconductor equipment that is used for depositing thin layers of materials on wafers. It is a great solution for etching and doping materials in a safe and precise manner, while eliminating many of the manual steps associated with traditional processes. TEL Alpha 808S is equipped with an impedance-type plasma source, temperature control, and a related control equipment to guarantee repeatable and consistent results. This accessorie is designed with an independent supply and exhaust system, which ensures a clean and safe environment. This ensures that all particulates or chemical contaminants remain within the chamber, thus avoiding any damage to the wafers during the process. TOKYO ELECTRON Alpha 808S accessorie is designed to handle single wafers as well as cassettes of wafers with up to twelve different macros. The wafers are held in place with a cassette Gripper, and the whole cassette is lifted upward and rotated to the heating zone. This allows for an even distribution of heat throughout the batch, which facilitates better substrate-to-substrate uniformity. Furthermore, Alpha 808S is also equipped with an advanced heating unit that reduces energy consumption and ensures uniform temperatures throughout the chamber. The control machine also includes Ultra High Vacuum (UHV) heating, wafer rotation, side wall cooling, and power fluence. The time for the entire process is adjustable, allowing for an increased speed of production. TEL / TOKYO ELECTRON Alpha 808S also offers excellent uniformity and repeatability when it comes to the deposition process. The furnace is temperature-controlled in order to achieve and maintain precision and accuracy. Its advanced wafer-rotation mechanism helps ensure a consistent coat of material and the temperature uniformity and repeatability help ensure a consistent film, even when processing multiple wafers. In addition, TEL Alpha 808S accessorie comes with an extensive safety tool to avoid any potential sources of contamination. It also offers a wide range of process parameters to offer a fully customizable process for users. This furnace is also designed to be user-friendly, boasting an intuitive control asset and graphical displays to help operators navigate the machining process with ease. Overall, TOKYO ELECTRON Alpha 808S diffusion furnace is a powerful and reliable piece of semiconductor equipment for etching and doping. With its ability to offer a fully customizable process, safe and precise results, and unparalleled wafer-to-wafer uniformity, it is the ideal solution for those looking for effective and efficient processing.
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