Used TEL / TOKYO ELECTRON Alpha 808SC #293774601 for sale

ID: 293774601
Vintage: 1998
LPCVD System 1998 vintage.
TEL / TOKYO ELECTRON Alpha 808SC is a state-of-the-art diffusion furnace equipment designed for advanced semiconductor processing applications. This versatile system is equipped with a range of features that enable precise control over the diffusion process, resulting in high-quality, uniform film growth across a variety of substrate materials. TEL Alpha 808SC is a horizontal, single-wafer diffusion furnace that can accommodate wafer sizes up to 300mm in diameter. The unit is capable of performing a variety of high-temperature processes, including oxidation, annealing, and chemical vapor deposition (CVD). This flexibility makes TOKYO ELECTRON ALPHA 808 SC ideal for a wide range of applications, from advanced CMOS device fabrication to MEMS and optoelectronic device manufacturing. One of the key features of Alpha 808SC is its advanced temperature control machine. The tool is equipped with multiple heating zones that allow for precise temperature profiling across the wafer surface. This level of control ensures that the temperature distribution across the wafer is uniform, leading to consistent film growth and minimizing variations in film thickness and dopant concentration. In addition to temperature control, TEL / TOKYO ELECTRON ALPHA 808 SC also features a comprehensive gas delivery asset that enables precise control over the process atmosphere. The model is capable of delivering a wide range of process gases and precursors, allowing for the deposition of a variety of thin films with varying chemical compositions. This capability is essential for tailoring film properties to specific device requirements, such as refractive index, electrical conductivity, and bandgap. TEL ALPHA 808 SC is also designed with throughput in mind, featuring a high-speed wafer transfer equipment that maximizes system uptime and productivity. The unit is fully automated, with recipe-driven operation and advanced process monitoring capabilities that enable real-time feedback and control. This automation not only reduces the risk of human error but also allows for optimal process repeatability and reproducibility. Furthermore, TOKYO ELECTRON Alpha 808SC is equipped with a range of safety features to ensure the protection of both the operator and the equipment. The machine is designed with multiple interlocks and alarms that prevent unsafe operating conditions and alert the operator to any issues that may arise during processing. This focus on safety not only protects personnel but also helps to safeguard the tool against potential damage or downtime. Overall, ALPHA 808 SC is a versatile and reliable diffusion furnace asset that offers precise control, high throughput, and advanced safety features. With its advanced temperature control, comprehensive gas delivery model, and automated operation, TEL / TOKYO ELECTRON Alpha 808SC is well-suited for a wide range of semiconductor processing applications requiring high-quality film growth and tight process control.
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