Used TEL / TOKYO ELECTRON Alpha 808SC #9083659 for sale

TEL / TOKYO ELECTRON Alpha 808SC
ID: 9083659
Vertical LPCVDs Process: SiO, SiN.
TEL / TOKYO ELECTRON Alpha 808SC diffusion furnace is a state-of-the-art fabrication tool designed for electronic device processing. TEL Alpha 808SC is a single-wafer vertical tube-type furnace that enables vapor deposition of silicon and other materials. The furnace has a maximum operating temperature of up to 1,000 degrees Celsius, providing high-quality thermal stability and uniformity. TOKYO ELECTRON ALPHA 808 SC's compact design makes it ideal for a wide range of applications, including advanced device production, manufacturing, semiconductor research, and educational purposes. ALPHA 808 SC furnace features two direct-drive motorized lift stages, providing exceptional speed and precision for handling substrates and wafers. Each stage is independently controlled via a touch-screen panel located on the front of the machine. The control panel also has an integrated controller equipped with a graphic user interface for easy operation and error-correction capability. The equipment also includes an automated vent system that allows for a safe and efficient evacuation of any chemicals used in the process. TEL / TOKYO ELECTRON ALPHA 808 SC is equipped with two Internal Gas Supply Lines (IGSLs), allowing for the introduction of up to three different gases during the process. A built-in gas mixer ensures uniform gas distribution across the tube, resulting in better process uniformity and improved yields. To maximize efficiency, the unit also has an automated pressure and temperature control machine, which can independently adjust the process parameters for each application. TOKYO ELECTRON Alpha 808SC comes with an advanced wafer transfer tool, allowing for safe and efficient loading and unloading of substrates. The transfer asset can accommodate a variety of wafer sizes, with a maximum 6-inch diameter. The model is compatible with several robot models, allowing for high-speed loading and unloading of wafers even during extended processes. Alpha 808SC is a cost-effective and reliable furnace that is designed to meet the most demanding fabrication and research needs. The advanced features and control capabilities make it an ideal choice for producing a wide range of electronics and semiconductors. TEL ALPHA 808 SC can help save both time and money while still providing excellent performance and quality results.
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