Used TEL / TOKYO ELECTRON Alpha 808SCE #9097867 for sale
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TEL / TOKYO ELECTRON Alpha 808SCE Diffusion Furnace is a high-performance, high-quality equipment designed to enable highly precise wafer processing in semiconductor fabrication. TEL Alpha 808SCE is equipped with TEL patented CX-Series controllers, delivering on-the-fly temperature control and uniformity, allowing for productivity gains and reliable high quality results. TOKYO ELECTRON Alpha 808SCE offers a wide variety of advanced features, such as progressive furnace loading, low-energy cooling, automated moisture and gas sealing, and fast, accurate temperature and pressure control. Its advanced Auto-Recover feature permits easy operation, enabling operators to quickly regain process control and maintain appropriate wafer temperatures throughout processing. Additionally, the diffusing system's stress equalization feature helps minimize warp shape changes, enabling high wafer yields and further improving quality. Alpha 808SCE comes with several accessories designed to enhance process capabilities. These include the Spacer Rotation Unit (SRU), which optimizes alignment and enhances uniformity. The Crawler Unit lets you easily load and unload wafers from the chamber, while the Shuttle Unit ensures easy movement within the chamber while minimizing contamination and process variation. TEL / TOKYO ELECTRON Alpha 808SCE is further enhanced by a variety of factory upgrade options including additional temperature zones, extra pressure sensors, and up to 30 extra zones to optimize uniformity. The upgradeable cooling unit, Improved Cooling Plate (ICP) is designed to improve layer profiles and to reduce cycle time by significantly reducing the time required to cool the wafers. TEL Alpha 808SCE also features an Enhanced Atmosphere Control Machine (EACS) which manages, monitors, and maintains an optimal atmosphere during processing. TOKYO ELECTRON Alpha 808SCE was designed to provide a high level of performance and reliability, while supporting a variety of process requirements. The advanced technology and resilience of Alpha 808SCE Diffusion Furnace ensures maximum productivity gains and optimal device performance.
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