Used TEL / TOKYO ELECTRON Alpha 808SD #293765074 for sale

TEL / TOKYO ELECTRON Alpha 808SD is a diffusion furnace and its accessories. It is designed to create a precise environment conducive to thermal oxidation, drive-in and drive-out, wet nitridation and other diffusion processing. TEL Alpha 808SD diffusion furnace has a maximum temperature range of up to 1250°C. It is equipped with a 12.1" color touch-screen programmable controller. It allows for direct input of process applications and parameters, as well as selection of the optimum process mode for each application type. The controller can store up to 40 recipes in its memory. The controller has a process monitoring function with a selectable screen display option. TOKYO ELECTRON ALPHA 808 SD diffusion furnace is also equipped with a microprocessor-based Process Monitoring Equipment (PMS), an analog optical pyrometer, thermocouple and drive-in control system. The PMS is capable of automatically calculating process variables such as set temperature, temperature rate and total cycle time. It also features various automatic alarms such as over-temperature, under-temperature and temperature deviation alarms. Alpha 808SD diffusion furnace is also equipped with an autoloader. The autoloader is designed to allow easy and efficient loading of multiple wafers into the diffusion furnace. It features various types of carriers such as gravity, vacuum and spring-loaded carriers. The autoloader is equipped with a microprocessor-controlled mechanism for precise movements to ensure precise and uniform temperature distribution on the processed surface. TOKYO ELECTRON Alpha 808SD diffusion furnace also features a horizontal transport unit. The machine is designed to transport the wafers from the autoloader to the processing chamber via an optical path. The wafers are securely held during the transport, ensuring precise and safe processing. ALPHA 808 SD diffusion furnace also features an exhaust tool. The asset is designed to quickly remove vapors, waste gas, smoke and particles from the process chamber. These features make TEL / TOKYO ELECTRON ALPHA 808 SD diffusion furnace and its accessories a reliable and effective tools for precise diffusion processing.